FIB-SEM | DB500
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Field Emission Scanning Electron Microscope (FE-SEM) with Focused Ion Beam (FIB) Columns
The CIQTEK DB500 Focused Ion Beam Scanning Electron Microscope (FIB-SEM) adopts “SuperTunnel” electron optics technology, low aberration, and non-magnetic objective design with low voltage and high-resolution capability to ensure the nano-scale analysis. The ion column facilitates a Ga+ liquid metal ion source with a highly stable and high-quality ion beam for nanofabrication.
FIB-SEM DB500 has an integrated nano-manipulator, gas injection system, electrical anti-contamination mechanism for the objective lens, and 24 expansion ports, making it an all-around nano-analysis and fabrication platform with comprehensive configurations and expandability.
CIQTEK DB500 FIB-SEM Features
• “SuperTunnel” Electron Optics technology with a magnetic-free objective lens, suitable for high-resolution imaging, and compatible with magnetic specimen imaging.
• The focused ion beam (FIB) column outputs a highly stable, high-quality ion beam, suitable for high-quality nano-fabrication and TEM sample preparation.
• A piezoelectrically-driven manipulator in the specimen chamber with an integrated control system for precise handling.
• Independently developed system with strong expandability. The integrated ion source assembly design for quick ion source exchange. Worldwide service, three-year warranty for FIB-SEM DB500.
| CIQTEK FIB-SEM DB500 Specifications | ||
| Electron Beam System | Electron Gun Type | High Brightness Schottky Field Emission Electron Gun |
| Resolution | 1.2 nm@15 kV | |
| Acceleration Voltage | 0.02~30 kV | |
| Ion Beam System | Ion Source Type | Liquid Gallium Ion Source |
| Resolution | 3 nm@30 kV | |
| Acceleration Voltage | 0.5~30 kV | |
| Specimen Chamber | Vacuum System | Fully Automatic Control, Oil-free Vacuum System |
| Cameras |
Three Cameras (Optical navigation + chamber monitor x2) |
|
| Stage Type | 5-axis Mechanical Eucentric Specimen Stage | |
| Stage Range |
X=110 mm, Y=110 mm, Z=65 mm T: -10°~+70°, R:360° |
|
| SEM Detectors and Extensions | Standard |
In-lens Detector Everhart-Thornley Detector (ETD) |
| Optional |
Retractable Back-Scattered Electron Detector (BSED) Retractable Scanning Transmission Electron Microscopy Detector (STEM) Energy Dispersive Spectrometer (EDS/EDX) Electron Backscatter Diffraction Pattern (EBSD) Nano-manipulator Gas Injection System Plasma Cleaner Specimen Exchange Loadlock Trackball & Knob Control Panel |
|
| Software | Languages | English |
| Operating System | Windows | |
| Navigation | Nav-Cam, Gesture Quick Navigation | |
| Automatic Functions | Auto Brightness & Contrast, Auto Focus, Auto Stigmator | |
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